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Nitrogen Trifluoride
Brief Introduction of NF3 Product
| Nitrogen trifluoride (NF3) gas is colorless,stable,toxic,which is used in semiconductor industry as cleaner of the chamber of CVD reactors,resulting in reduced etched silicon surface deposition of the silicon and tungsten compounds, and etchant of polysilicon,silicon nitride,tungsten silicide and tungsten films. |
| QUANLITY STANDARD FOR NF3 |
| ITEM |
UNIT |
| PURITY |
99.8% min |
| CO2 |
80PPM max |
| CO |
130PPM max |
| CF4 |
500PPM max |
| N2 |
100PPM max |
| N2O |
80PPM max |
| O2 |
100PPM max |
| SF6 |
25PPM max |
| H2O(V/V) |
1PPM max |
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