Carbon fluoride
| QUANLITY STANDARD FOR CF4 |
| ITEM | UNIT | ||
| CF4 % (V/V) min | 99.995 | 99.99 | 99.9 |
| CO2 PPM (V/V) max | 10 | 20 | 80 |
| CO PPM (V/V) max | 10 | 10 | 20 |
| O2 PPM (V/V) max | 10 | 20 | 350 |
| N2 PPM (V/V) max | 20 | 40 | 350 |
| H2O % (V/V) max | 2.0 | 3.0 | 5.0 |
| Acid mg/g max | 0.1 | 0.1 | 1.0 |
| total impurities ppm max | 50 | 100 | 1000 |
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